JPH0556460B2 - - Google Patents

Info

Publication number
JPH0556460B2
JPH0556460B2 JP59118820A JP11882084A JPH0556460B2 JP H0556460 B2 JPH0556460 B2 JP H0556460B2 JP 59118820 A JP59118820 A JP 59118820A JP 11882084 A JP11882084 A JP 11882084A JP H0556460 B2 JPH0556460 B2 JP H0556460B2
Authority
JP
Japan
Prior art keywords
sample
layer
electrons
cleanliness
covered
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP59118820A
Other languages
English (en)
Japanese (ja)
Other versions
JPS60262043A (ja
Inventor
Masayuki Uda
Fumiaki Kirihata
Sukenori Shirohashi
Hiroshi Ishida
Shinji Marutani
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Riken Keiki KK
Hochiki Corp
RIKEN
Original Assignee
Riken Keiki KK
Hochiki Corp
RIKEN
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Riken Keiki KK, Hochiki Corp, RIKEN filed Critical Riken Keiki KK
Priority to JP11882084A priority Critical patent/JPS60262043A/ja
Publication of JPS60262043A publication Critical patent/JPS60262043A/ja
Publication of JPH0556460B2 publication Critical patent/JPH0556460B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/227—Measuring photoelectric effect, e.g. photoelectron emission microscopy [PEEM]
    • G01N23/2273—Measuring photoelectron spectrum, e.g. electron spectroscopy for chemical analysis [ESCA] or X-ray photoelectron spectroscopy [XPS]

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
JP11882084A 1984-06-09 1984-06-09 表面の清浄度計測方法 Granted JPS60262043A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11882084A JPS60262043A (ja) 1984-06-09 1984-06-09 表面の清浄度計測方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11882084A JPS60262043A (ja) 1984-06-09 1984-06-09 表面の清浄度計測方法

Publications (2)

Publication Number Publication Date
JPS60262043A JPS60262043A (ja) 1985-12-25
JPH0556460B2 true JPH0556460B2 (en]) 1993-08-19

Family

ID=14745947

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11882084A Granted JPS60262043A (ja) 1984-06-09 1984-06-09 表面の清浄度計測方法

Country Status (1)

Country Link
JP (1) JPS60262043A (en])

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0711495B2 (ja) * 1982-05-07 1995-02-08 株式会社日立製作所 光電子測定方法

Also Published As

Publication number Publication date
JPS60262043A (ja) 1985-12-25

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term